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: 539.213; 539.23+621.793.79; 539.26 ԲͲ Ҳ ˲ Dz Вв W-Ti-N Ta-Si-N ...

-- [ 9 ] --

Ti/W, W-Ti-N, Ti/W = 0.43. , , Ti/W , . , Ti (mTi = 47.9 a.o.. [77]), W (mW = 183.8 a.o.. [77]), Ar (mAr = 39.9 a.o.. [77]), , , [85]. , , , TiN, .

d.c. - W-Ti (30 .%) , Ar-N2, pN2 0 0.35 , pAr+N2 = 0.5 , P.. = 300 . , - W-Ti-N, pN2. , : 1) (0 pN2 0.01 ); 2) (0.01 pN2 0.05 ); 3) (0.05 pN2 0.35 ). , W Ti, , WN TiN, , + N = N (: W, Ti), .

, pN2 , :

1. W Ti, N ;

2. , ;

, () - 3.

(), ;

4. , .

W-Ti-N, Au/W-Ti-N/GaAs, , (pN2 = 0.02 ). W64Ti16N20 (100 ), ~ 255 , Au GaAs, 750.

   

, () , .

, 糺 , , , .

, , , .

г , Ta Ta-Si [41, 86, 87], Ta Ta-N [41, 87-89], Ta- [90], Ta-B [91], , , . , , , , , , , , .

, ' ( Me: Ta, Ti, W, Zr), (-N, -Si, -B, -C), , ~ 600 [8, 41, 86-95].

, , , , 糿.

, , , .-. [5, 6, 18, 96, 97].

ֳ : 1) (TM), Ta, Ti, Mo, W .; 2) ( ); 3) ( ). , , , , [98-104]. ( , , ) , mictamict alloys [105], .

( Ta-Si-N), :

1. (Al-, Cu//Si [106-110]);

2. [111, 112];

3. - - [113, 114];

4. X- [115].

, , , , , 㳿 .. Ta-Si-N, ( , fN2). , , . , Au-,Ag//GaAs Au//GaN, 400 800. , Ta-Si-N, .

4.1. Ta-Si-N :

Ta-Si-N GaAs (100), . , 㳿 , 2.

.4.1, Ta-Si-N, fN2 0 5% , fN2 = 12%. fN2, pAr+N2. , , [31], .

( pAr+N2), , .

.4.1 Ta-Si-N, GaAs, fN2.

(Ar + N2).

Ta-Si-N, fN2, Ta-Si-N(100 )/GaAs, .4.2. , fN2, (200 ) (100 3), N (.%) , Ta/Si, .

Ta-Si-N 0 50 .%, fN2/fAr 0 20%, . , Ta-Si-N, , Ta-Si-N .

.4.2 .. Ta-Si-N, fN2.

- Ta-Si, Ta/Si ~ 2, Ta5Si3 ~ 1.



140 .


67, Ta. 5%, (~ 2.95). ( 5%), Ta Ta-Si-N, fN2/fAr = 8%, Ta/Si . Ta/Si, , Ta Si, [116]. Ti-Si-N, Ti/Si [17, 19, 117]. , Ta-Si-N, , .

Ta-Si-N, , .4.3, - Ta67Si33, ~ 6.31022 ./3, (~ 61022 ./3) ᒺ (Ta5Si3, Ta2Si, TaSi2), [63].

( fN2), Ta-Si-N, Ta-Si-N, 81022 ./3, N 40 .%.

50 .%., Ta-Si-N 8.91022 ./3, 3% ᒺ TaN (~ 8.71022 ./3), 7% ᒺ -Si3N4 (~ 9.51022 ./3), [63]. г , , , , .

.4.3 , Ta-Si-N. ᒺ , Si3N4 , .

4.1.1. Ta-Si-N.

Ta-Si-N, GaAs (100), fN2/fAr, .4.4. , , 2 ~ 35-38, ( fN2), ().

- Ta67Si33, 2 ~ 38-39, [118, 119]. , (213) Ta5Si3 (2 = 38.4).

, ( ), Ta67Si33, , Ta5Si3.

N Ta-Si, 2 ~ 38 Ta67Si33 2 ~ 35 Ta34Si25N41. , , TaSi-N. ( ), ~ 4 ~ 3 , Ta67Si33 Ta53Si20N27, . , , TaSix, . , [120, 121].

.4.4 Ta-Si-N fN2/fAr. .

4.1 , .4.5 㳿 Ta-Si-N, (). , , , . , .4.1, Ta-Si-N , (RMS) 0.3 0.7 ( - 11 2). , , - [113, 114], X- [115]. , RMS , , .

Ta-Si-N (10010 ), GaAs (20050 ), (. .4.1). ( N ), ~ 1 - ~

1.6 Ta53Si20N27, 5% . (fN2/fAr 5%), ~ 1 . , Ta-Si-N, , , , .

   

4.1.2. Ta-Si-N.

Ta-Si-N (10020 ), GaAs, N fN2, , .4.6. , Ta-Si-N ( fN2), , .



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