WWW.UK.X-PDF.RU

˲ - , ,

 
<< HOME
CONTACTS




( )
.: (050)697-98-00, (067)176-69-25, (063)846-28-10
׸



. +420704758365

( )
.: (050)697-98-00, (067)176-69-25, (063)846-28-10
׸
Pages:     | 1 |   ...   | 6 | 7 || 9 | 10 |   ...   | 14 |

: 539.213; 539.23+621.793.79; 539.26 ԲͲ Ҳ ˲ Dz Вв W-Ti-N Ta-Si-N ...

-- [ 8 ] --

1. Ti N W, ;

2. ( );

3. .

, ( 50 55 .%), (. .3.7 (-)): ~ 20 W40Ti10N50 (~ 500 ), ~ 18 W37Ti11N52 (~ 690 ) 14 W34Ti11N55 (~ 900 ), . , , , , .

W-Ti-N 1000 , .

.3.9 W-Ti-N, GaAs, . г , , .

3.2. W-Ti-N Au GaAs W-Ti-N, Au/-/GaAs (11 2), W-Ti-N ( ~ 100 ), Au (~ 200 ), . , 5 . Ar 800, , (), (Rs) , ﳿ.

, , 䳿, [80]. , 25 .% Ag , Au [81]. , , . , , , ﳿ.

.3.10, (RsT) Au/W-Ti-N/GaAs, , 800 (5 ., Ar), (Rs) . , , Au GaAs, .

, ᒺ Au ~ 2.3 [77].

, Au (200 ), Rs ~ 0.1 /. W-Ti-N, Rs 100 /100 = 10 /, .

.3.10 Au/W-TiN/GaAs, , (5 ., Ar): ) ; ) W78Ti22; ) W70Ti18N12; ) W64Ti16N20;

) W56Ti12N32; ) W40Ti10N50; ) W37Ti11N52; ) W34Ti11N55. Rs . RsT .

, GaAs ( 107 ), Au/W-TiN/GaAs, . , Rs ~ 0.2 /, , ~ 4 Au, ᒺ . , , , Rs, Au(~ 90 )/GaAs Au(~ 200 )/W-Ti-N/GaAs , , W-Ti-N .

Au/GaAs 400, (.3.10, ). (340 Au-GaAs [27]), , AuGaAs , Au/GaAs .

, 600, Rs 10% Au/W-Ti/GaAs 30% Au/W-TiN/GaAs (.3.10, -), Au. , Rs 10% 600, Au/W78Ti22/GaAs, . г Rs , 700, Au/W78Ti22/GaAs. (.3.11, ), , 600 , 700. , Au/W78Ti22/GaAs, 600.

Au/W70Ti18N12/GaAs, 700, Rs (.3.10, ), 600.

.3.11 2 + , 800 (Ar, 5 .), : ) GaAs/W78Ti22/Au; ) GaAs/W64Ti16N20/Au; ) GaAs/W56Ti12N32/Au.

Rs , 750 , Au/W64Ti16N20/GaAs, ( 15 ), 800 (.3.10, ), . , 750 Au/W64Ti16N20/GaAs (.3.11, ), - Au GaAs, W64Ti16N20. , , 800, .

Rs (.3.10, ,), (.3.11, .3.12, ), Au/W56Ti12N32/GaAs Au/W40Ti10N50/GaAs, 700, 糿 . Au/W56Ti12N32/GaAs, Rs 750, ( 100 ), 800. (.3.11, ) , 750, 800, .

(.3.10, ,), (.3.12, ,), Au/W37Ti11N52/GaAs Au/W34Ti11N55/GaAs, 650. 700, Rs ( ) , , , 糿 Au/ /GaAs .

, 700, - (W78Ti22), (.3.11, ), Au , Ga As , (W37Ti11N52 W34Ti11N55), , (.3.12, ,).

.3.12 2 + , 800 (Ar, 5 .), : ) GaAs/W40Ti10N50/Au; ) GaAs/W37Ti11N52/Au; ) GaAs/W34Ti11N55/Au.

, , . . 3.1.1., W78Ti22 , W37Ti11N52 W34Ti11N55, .




140 .


Au/W40Ti10N50/GaAs, Au/W37Ti11N52/GaAs Au/W34Ti11N55/GaAs, Au 800, 糺 , .

3.3.

, () .

, - : 1) 㳿 , ; 2) , . , , , . , , , (, , ) - .

, W-Ti-N, (N2) (Ar-N2). - [74, 82], - , W-30at.% Ti, Ar-N2, (W, Ti, N), (WN, TiN). (/), .

pN2, d.c. W-Ti-N (): 1) ; 2) ; 3) [83].

(0 pN2 0.01 ), - , , (W, Ti), , . , - ( W(Tix, Ny) ), W, Ti W-Ti-N, . , , N , , W-Ti-N, W Ti [83].

W-Ti-N (, N 12..%), Au//GaAs [84], , 600. W-Ti-N, , .

(0.01 pN2 0.05 ) [83], 1-xNx(: W, Ti), - W, Ti N , W1-xNx Ti1-xNx, N. , , WN TiN, W, Ti N . , , . г , 1-xNx , (: W, Ti), , .

W64Ti16N20, , 糿 Au GaAs, 750 [84].

, W64Ti16N20, 糿, .

(0.05 pN2 0.35 ) [83], , , - W, Ti N , pN2.

, , W, Ti N , + N = N (: W, Ti), . W2N/TiN ( WxTiyNz ), , . , Ar+, Ar+, N2+ N+, . , N, ( Ti W), .

W-Ti-N (, 32 N 55 .%), Au//GaAs, 700 [84]. , 糿 , , , 糿.

, , ( , ). , , , .



Pages:     | 1 |   ...   | 6 | 7 || 9 | 10 |   ...   | 14 |
:

̲Ͳ ² Ͳ ˲ Բ 2 - 22.3 60 53 (076.2) : - .-. , . .. , . .-. , . .. ...

Ͳ Dz һ . Ͳ 1.1. һ.1.2. Գ 1.3. -һ, . (Na- ), 65,5 %, . 10% 20%, 4,5%. 5 . ...

.. : ϲ 22.172 89 - 2010 ( : -) . .. : . . . ...

в ̲ί -ί ֲ ί Ȼ (5-6 2014 ) 001.18(063) 7243 27 . 27 - (. , 5-6 2014 ). : , 2014. 200 . ISBN 978-617-7041-83-8 - . ...

̲Ͳ ² ² ֲ Ͳ Ͳ ԲԲ ̲ ԲԲ ϲҲ ײ Ͳ ² 2006 . , 2006. : ³ ...

୲ⲭ 620.179.15:004.421.2 ..,..,ࠪ.. 50-в ϒί Բ. в ȯ ˲Ͳ һ. . ³ 50- , ...

615.327.07:663.64](477.87) 0110U001948 . ̳ - 㳿 ( IJ ) 65014, . , . , 6 . (048) 722-35-68 IJ ..., . .. 2010 . ² -˲ -ò ̲ Ҳ ̲ί (ί), ί -...

̲Ͳ ² , IJ ʲ ֲ Ͳ IJͲ Ҳ 658:512.011:681.326:519.713 -ò 05.13.05 2012 . , ̳ ,...

. - . 371.3:53 . . .. -ò ֲ . ...

ֲ ̲ ί Բ . . . 537.611 01.04.02 2008 , :...




( )
.: (050)697-98-00, (067)176-69-25, (063)846-28-10
׸


 
<<     |    
2013 www.uk.x-pdf.ru -