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: 539.213; 539.23+621.793.79; 539.26 ԲͲ Ҳ ˲ Dz Вв W-Ti-N Ta-Si-N ...

-- [ 7 ] --

, Ar, Ti/W ~ 0.28, , Ti/W = 0.43. , , , Ti/W , , , .

.3.3 , , , , GaAs. , .

.3.4, W-Ti-N, pN2, . , 10%, , GaAs C , . , .3.4 (), ᒺ W Ti, (W1-Nx Ti1-xNx), N. , .

.3.4 W-Ti-N () ().

, .

.3.4 () , pN2, , , N, . pN2 (.3.2), pN2 0.2 .

- W78Ti22, ~ 5.71022 ./3, 10% ᒺ W (6.31022 ./3), ᒺ Ti (5.651022 ./3), [77].

4555 .% , W-Ti-N, ~ 80.11022 ./3. ͳ , , , . , W-Ti-N, ᒺ Ti-N (10.571022 ./3), W-N (9.71022 ./3), W2N (10.141022 ./3), [63], Ti1-xNx (x = 0.55, 10.51022 ./3), [78]. г W-Ti-N, W1-xNx Ti1-xNx, .

ᒺ Ti2N (81022 ./3) [63], Ti1-xNx (0.32 x 0.55, 7.6 - 10.51022 ./3) [78], W-Ti-N.

˳ W-Ti-N, , , (.3.4, ). : y = 5.6619 + 4.4446x ( y (./3), x (.%)).

3.1.1. W-Ti-N, .

W-Ti-N, Ar-N2, (pN2 = 00.35 ), .3.5. W-Ti-N, , ( pN2), , , , , .

.3.5 W-Ti-N, pN2 . ( ; ; ), N/(W+Ti).

- W78Ti22, , 2 ~ 39.796, (110) (ᒺ - ) , ~

0.3204 . W ( = 0.3165 , W(2)), Ti ( = 0.3306 , W(2)) [79]. , Ti ( rTi = 0.147 [63]) W W (rW = 0.139 [63]), , -W(Ti).

(pN2 = 0.01 ), ~ 0.3241 .

12 .% , N (rN = 0.07 [63]) - -W, . , -W, , : 1) ; 2) ; 3) (110) .

, W-Ti-N, (M: 0 pN2 0.01 ), -W(Tix, Ny), , x 22 .% y 12 .%.

20 .% N, (: 0.01 pN2 0.05 ), 2 37 43. , . , , W64Ti16N20, , -W, Me1-xNx (Me: W, Ti), . - W-Ti-N, ij . [70, 71], 25 .% N - TiN, W, W2N / Ti2N WN. , / , [75, 76].

, (pN2 0.05 ), , (111) (200) ( - ) . W56Ti12N32 (pN2 = 0.05 ), (111) (200) , ~ 0.4235 . , TiN ( = 0.4243 , NaCl(B1)), W2N ( = 0.4118 , NaCl(B1)) [79]. .3.6, , , ~ 0.4368 , pN2 0.2 . , N/(W+Ti) 1. ˳ , pN2, : y = 0.4198 + 0.069x ( y (), x pN2 ()), , N 50 .%.

, , [100], 0.470 N/(W+Ti) 0.754.

0.754 N/(W+Ti) 1.222, [100] , [111]. TiN W2N ( (200)), . , N, (111) (200) , , , .




140 .


.3.6 W-Ti-N , (), pN2. .

ͳ TiN W2N, (TiN/W2N ~ 1.03), . , , , W-Ti-N (N/(W+Ti) 0.47), W2N/TiN (WxTiyNz ). , , WxTiyNz. WxTiyNz , W2N , Ti / N.

, W-Ti-N, (: 0.05 pN2 0.35 ), WxTiyNz, , 34 x 56 .%, 10 y 12 .%, 32 z 55 .%.

pN2, , (RMS) , W-Ti-N, .3.7.

0 10 20 .3.7 W78Ti22(), W70Ti18N12(), W64Ti16N20(), W56Ti12N32(), W51Ti11N38(), pN2 = 0.12 , W46Ti11N43(), W43Ti12N45(), W40Ti10N50(), W37Ti11N52(), W34Ti11N55(). 11 2.

   

.3.7 (-)., W-Ti-N 㳺 , pN2.

W-Ti-N, 5 90 .

, , ( ). , , , , 6 15 . , : , . ֳ , , pN2 = 0 , (.3.7, ) , pN2 = 0.01 (.3.7, ). , N ,

-W, , 糿 .

W-Ti-N, , 11 2, 0.7 5.5 , .

W-Ti-N (10020 ), GaAs (22525 ), pN2, .3.8 (). W-TiN , , . ³, , , .

.3.8, pN2 ( N ): ) (pN2 0.15 ) ~ 5 , ; ) (pN2 0.15 ) , . , W-Ti-N N, . , , , , .

.3.8 , , W-Ti-N , pN2. , ( ) (.3.7).

3.1.2. W-Ti-N.

W-Ti-N (10020 ), , .3.9, pN2. , N , , . ( .3.9), ( ), .

W78Ti22 ( ), ~ 120 . , ᒺ W (5 ) Ti (40 ) [77], Ti, .

( pN2), ~ 430 W43Ti11N46. 45 .%, , . W-Ti-N, ᒺ WN (50 ) Ti1-xNx (0.97 x 0.79, 40 - 85 ) [63], W-Ti-N, , . ij, pN2 = 0.2 , TiN W2N ( (200) ), 15%.

, W-Ti-N, pN2, :



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