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: 539.213; 539.23+621.793.79; 539.26 ԲͲ Ҳ ˲ Dz Вв W-Ti-N Ta-Si-N ...

-- [ 6 ] --

1.3 , . , , - , . = 150. Al (13.6 ), , . , , RUMP.

, ~ 10 %.

2.2.4. - .

, , - Cameca IMS 6F, . 2.7. ² [58], , ( Cs+) , , , . , ² , .

   

, (1) (2), (3-4), (5). , (6-8), (9), (13) . 䳿, - , , , , .

2.2.5. .

, , (ex-situ) Philips XPert MPD (CuK1, = 0.15418 ), -, .2.8. , (), .

, , , .

, - [59]:

2d sin = (2.21) ( ) (h, k, l), d , .

, , . PDF-2, ICDD (International Centre for Diffraction Data) [60].

, d, : 2 = d2 (h2+k2+l2) [59].

   

2.2.6. , - .

³ , BX-51 System Optical Microscope.

̳ ( ). ³ ( ): , .

50x 1000x. , 1500 , 50x .

̳ Microscope Digital Camera DP11 (2.5 ), Olympus DP-Soft , . , , .

, //, (). , , [61], JEM-200CX, 200 .

㳿, , , , - () NanoScope IIIa Dimension 3000TM ( Digital Instruments, USA).

(ex-situ), (Tapping Mode), ~ 10 .

NanoScope IIIa, - , . (RootMean-Square), , y, y2 : (RMS) = ( y1 +...yn ) / n.

   

, , , , . , - ᒺ , , .

, , : , , , , , , . , , , - , .

   

䒺 . III-V, GaAs GaN, Au , , . , Au 400 500 [26, 27, 62], . , , Au , Au III-V.

, , , , , [63], , , , --, . , , .

-, W-N Ti-N, [64-67]. , - , , , Ti (10-30 .%) W-N, [3, 68, 69]. 䳿 Ti , N W-Ti-N, - .

, W-Ti-N, W1-xTix Ar-N2 [69-74]. , W-Ti-N, . , [75, 76], , , : 1) ; 2) ; 3) . ( ), W-Ti-N, , , . , , , .




140 .


, , , , , 㳿 d.c. W-Ti-N, ( , pN2). , (N2) (Ar-N2). W-Ti-N, . , Au/W-Ti-N/GaAs, .

, , .

3.1. , W-Ti-N W-Ti-N, GaAs, [100].

, , , 2.

W-Ti-N, pN2, .3.1, , : 1) ; 2) ; 3) .

.3.1 W-Ti-N GaAs, pN2. , , , .

W-Ti-N, (M: 0 pN2 0.01 ), pN2, . г pN2, (: 0.01 pN2 0.05 ), ( - ), . (: 0.05 pN2 0.35 ), pN2, Ar+ Ar+, N2+, N+ [73], , .

2, - .

, pN2 , W-Ti-N .

.3.2, () W78Ti22 (pN2 = 0 ), W64Ti16N20 (pN2 = 0.02 ) W40Ti10N50 (pN2 = 0.25 ), , (, , ). RUMP . 5%, .

3.2 (-) , pN2 N, W Ti, , pN2.

, 3 5% (Ar, 2, ), .

.3.2 2 Me He+ W78Ti22 (), W64Ti16N20 () W64Ti16N20 (), .

RUMP , pN2 = 0 0.35 , GaAs C, W-Ti-N, pN2, .3.3.

pN2 , W-Ti-N, W Ti (.3.3). , , , ( pN2).

.3.3 ճ W-Ti-N, pN2 . , , . .

(pN2 0.05 ), N 0 32 .%. (pN2 0.05 ), , , . , W-Ti-N , pN2 = 0.25 , 50% Ar. , pN2 = 0.25 , 0 50 .%., .



Pages:     | 1 |   ...   | 4 | 5 || 7 | 8 |   ...   | 14 |
:

ϳ 179 ²в IJ : 185 ²в IJ Ozzy Ozone ϳ 191 ²в IJ 195 ²в IJ 183 ...

ò ˲ 2007 2008 2007 : . , 2008. 71 . , 쳿 2007 . , , , , ...

54+53(477)20 ³ ³, - . ., . 㳿, - - . . - . . (. -) ղ̲ Բ ̲ò ( ) , - , , ...

ֲ ̲ ò ̒ 02002, . , . . , 4; . (044) 517-17-37 517-02-28 : 578.81 Ҳ 0107U003291 ..., ., . . _.. 2010 . ² - 77.07: () , . ....

’ ò Ͳ Բ- в: ײ , , . ˲ϲͲ ײ ’ II ³ 200 ˲ϲͲ ײ ’ II ί ˲ϲ 2007 6 11 2008 2008 371.384:51 (076) 22.1 543 .., .., ..,...

ϳ . , , . (. 5). , . , ...

ȯ ֲ Ͳ Ͳ . . . . в ͲҲ ϳ ̳ 539.3:620.179.14(075.8) 22.25173 83 : - .-. , . .. , - .-. , . .. , - . , . .. ...

. 2. 2010. 553.04 (477.43/44) ΪҲ ò ֲ IJ . - 1995 2008 . ...

ֲ ̲ .. NATIONAL ACADEMY OF SCIENCES OF UKRAINE V.E. Lashkaryov Institute of semiconductor physics 2012 Lashkaryovs readings 2012 Young scientists conference on semiconductor physics Abstract books , Kyiv, Ukraine 20 ...

̳ , .. .. .. Գ - - -2013 53:378.147.88 22.3 30 73 : .. - , .. ...




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