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: 539.213; 539.23+621.793.79; 539.26 ԲͲ Ҳ ˲ Dz Вв W-Ti-N Ta-Si-N ...

-- [ 12 ] --

3. , N , , , , Ta34Si25N41, 1000, 750 , 糿 Au-,Ag GaAs, Au GaN, 800;

4. , Ta-Si-N , , N, SiNx (/), TaNx (/).

Ͳ

1. W-Ti-N, : 1) ; 2) ; 3) .

, , W Ti, , WN TiN, , + N = N (: W, Ti), .

2. W-Ti-N, () (), , . , Au/W-Ti-N/GaAs, 750 W64Ti16N20, , (~ 255 ).

3. , Ta-Si-N, , TaSix , . , Ta34Si25N41, , 750 , 1000, Au-,Ag GaAs, Au GaN, 800.

4. Ta-Si-N, , , Ta-Si-N. г N, SiNx (/), TaNx (/).

5. Ta-Si-N, , , , 900.

6. ǒ, Ta-Si-N, W-Ti-N, . Ta-Si-N, - SiNx ( Si-N), W-Ti-N, W-N Ti-N .

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