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: 539.213; 539.23+621.793.79; 539.26 ԲͲ Ҳ ˲ Dz Вв W-Ti-N Ta-Si-N ...

-- [ 11 ] --

.4.15 , 800 (Ar, 5 .), Au/Ta34Si25N41/GaAs.

4.3.2. Ag//GaAs.

Ta-Si-N Ag//GaAs, Ag ~ 115 , d.c. Ta-Si-N ~ 100 , GaAs (11 2). Ag Ta-Si-N, GaAs, , 2.1.

Ag/Ta-Si-N/GaAs, Ar 400 800 5 ., .4.16. , , Ag(~ 115 )/GaAs, .

Rs ~ 0.25 /, ~ 2.875 , 115 . , ᒺ Ag (Ag ~ 1.6 [77]), . , Rs , Ag(~ 115 )/GaAs Ag(~ 115 )/Ta-Si-N/GaAs , , Ta-Si-N . , , 糿 .

.4.16 Ag/Ta-Si-N/GaAs, 5 . (Ar) 400 800.

o Ag-Ga (540 C), Ag GaAs, 400oC, Ag , Ag/GaAs (.4.16).

400oC Ag/Ta-Si/GaAs, 600oC Ag/Ta-Si-N/GaAs, Rs 20 %. 糺 , .

Ag//GaAs, - Ta67Si33, 700oC, . Ag/Ta-Si-N/GaAs, , 700oC. Rs , 800oC, Ta-Si-N (N: 27 36 .%), . () , 800oC Ag/Ta53Si20N27/GaAs, .4.17 (). , , 800oC, Ta53Si20N27 (110 ).

700oC Ag/Ta34Si25N41/GaAs (.4.17, ), . , 800oC. Ag/Ta34Si25N41/GaAs, 800oC, . .4.17 (), Ag, - .

㳿 , 800oC Ag/Ta34Si25N41/GaAs, .4.18.

.4.17 2 + : ) Ag/Ta53Si20N27/GaAs 800oC (Ar, 5 .); ) Ag/Ta34Si25N41/GaAs 700 800oC (Ar, 5 .).

, RMS ~ 1 (.4.18, ). ϳ (800oC), ~ 7 , Ag, ~ 500 (.4.18, ). 800oC , Ag (.4.18, ).

, ~ 500 1 2. Ag, , . , (.4.17, ), , 800oC.

, (.4.16), Ag, (.4.17, ).

.4.18 Ag/Ta34Si25N41/GaAs: ) ; ) Ar 800oC 5 . (), 4040 2.

4.4. Ta-Si-N Au GaN 4.3, Au Ag GaAs, Ta34Si25N41. , , Au GaN.

, Au/Ta34Si25N41/GaN, Ta34Si25N41 (~ 100 ) Au (~ 100 ) GaN.

, GaN, 2.1. , 800 (Ar, 5 .) , (²) ().

800 Au/Ta34Si25N41/GaN, , .4.19. .4.19 (, ), , . Au/Ta34Si25N41 Ta34Si25N41/GaN, .

Au, , 800 糿 Au Ta34Si25N41. , (800), ², 糿 Au/Ta34Si25N41/GaN .

, (), Au/Ta34Si25N41 Ta34Si25N41/GaN.

.4.19 ² - Au(~ 100 )/Ta34Si25N41(~ 100 )/GaN: ) ; ) Ar 800oC 5 .

- , 5 . 800oC Ar, Au/Ta34Si25N41/GaN, .4.20. .4.20 (, ) , , , , - . Au/ /GaN, , , , .

, Ta34Si25N41 ( Au, ), 800oC . , Ta34Si25N41, 900oC, .

, ² , Ta34Si25N41 Au//GaN, 800oC 5 . , , , Au, Ag GaAs Au GaN, Ta34Si25N41.

.4.20 - Au(~ 100 )/Ta34Si25N41(~ 100 )/GaN: ) ; ) Ar 800oC 5 .




140 .


4.5. .. Ta5Si3, Ar/N2, fN2 0 20 3, (fAr = 100 3) P.. = 200 . Ta-Si-N, ~ 353 /., (Ar - N2).

.4.21 (), , 0 50 .%, Ta Si Ta-Si-N. , , fN2. , Ta-Si-N, . , , Ta/Si 1.67. , Si , .

Ta Si, Si (mSi = 28 a.o.. [77]), Ta (mTa = 180.9 a.o.. [77]), , , , Ar (mAr = 39.9 a.o.. [77]), . , fN2, , , Si N, .

, - , [122],. , Ta5Si3, Ar, , (~ 4 ) TaSix . , , . , N , Ta Si ( ). , TaSix , fN2. , TaSix, Ta-Si-N. ֳ [116], Ta-Si-N ﳺ , , Ta-Si, Ta-N Si-N.

, Ta-Si-N. г N, SiNx (/), TaNx (/) [123].

Ta-Si-N, Au-,Ag//GaAs Au//GaN [123: 1) 34 .% , 25 .% , 41 .% , 750 ; 2) , 1000; 3) Ta34Si25N41 100 , 䳺 , - , 800.

, Ta-Si-N (.4.21, ):

1. I, , , 糿 ;

2. II, , , , ;

3. III, , 1000 ;

4. , .

, Ta-Si-N, .

, , [6, 96], Ta-Si-N, , . , Ta-N Si-N. - mictamict alloys, () (), mictamict, .

.4.21 Ta-Si-N: ) fN2; ) I - ; II - ; III .

Ta5Si3,

Ar Ar/N2 , :

1. fN2 , , Ta Si, Ta-Si-N, , Ar/N2;

2. Ta-Si-N, ( ), Ta Si, TaSix , ;



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