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: 539.213; 539.23+621.793.79; 539.26 ԲͲ Ҳ ˲ Dz Вв W-Ti-N Ta-Si-N ...

-- [ 10 ] --

- Ta67Si33 (fN2 = 0), ~ 300 , ᒺ TaSi2 (46 ), Ta5Si3 (108 ) Ta2Si (124 ) [63]. Ta67Si33, , , ᒺ.

( fN2/fAr = 8%), ~ 425 , Ta40Si24N36.

( ), , .

.4.6, TaSi-N 40 .%, , . Ta34Si25N41 (fN2/fAr = 10%), ~ 750 , Ta28Si22N50 (fN2/fAr = 20%), ~ 3.8104 . Ta2N (263 ) TaN (198 ) [63], ᒺ Ta-Si-N, Si3N4, ~ 1019-1020 [63]. , , , Ta-Si-N, , (.4.4).

Ta-Si-N, , (Ta Si). , , Si-N (), Ta-Si-N, fN2/fAr 10%.

1000 , , Ta-Si-N, ( , .4.6).

.4.6 Ta-Si-N, fN2. , , Ta-Si-N. , .

4.2. Ta-Si-N GaAs

, Ta-Si-N, GaAs. , Ta67Si33(~100 )/GaAs Ta34Si25N41(~100)/GaAs, 5 . Ar, 400 1000C. (), - (²), - ﳺ () , .

, 800C Ta67Si33/GaAs, .4.7. , , GaAs. , , Ta67Si33, 4.1.1. - , 600C. (800C), Ta5Si3 TaSi2.

㳿 Ta67Si33, 700C, .4.8. , ~ 0.67 (.4.2), 600oC, (.4.8, ). ~ 3.6 , 700oC, ~ 60 (.4.8, ).

4.7 4.8, , . , Ta67Si33, 700oC, Ta5Si3 TaSi2, .

.4.7 , 700 800C (Ar, 5 .), Ta67Si33/GaAs.

.4.8 㳿 Ta67Si33/GaAs: ) 600C 5 . (Ar); ) 700C 5 . (Ar).

, Ta67Si33/GaAs, - (²), . 4.9.

.4.9 (), ² - 600C , Ta67Si33/GaAs. ² , 700C 糿 , Ga As , , 800C (.4.9, ).

, , Ta67Si33/GaAs 600C, - - Ta-Si.

, 900 1000C, Ta34Si25N41(~ 100 )/GaAs, .4.10. GaAs, , 900C, , Ta34Si25N41/GaAs, . , Ta34Si25N41 . , .4.10, 1000C, : Ta5Si3 TaN0.8.

Ta34Si25N41, 900 1000C, .4.11. .4.11 (), , ~ 0.45 , 900oC, .

, .4.2, 1000oC, ~ 1 , 20 . , , Ta34Si25N41, 1000oC, Ta5Si3 TaN0.8, .

.4.9 ² Ta67Si33/GaAs: a) 600C 5 . (Ar); ) 700 800C 5 . (Ar).

.4.10 , 900 1000C (Ar, 5 .), Ta34Si25N41/GaAs.

.4.11 㳿 Ta34Si25N41/GaAs:

) 900C 5 . (Ar); ) 1000C 5 . (Ar).

² , Ta34Si25N41/GaAs (, 800, 900 1000oC), .4.12. , Ta34Si25N41/GaAs , 800oC, ² 800oC (.4.12, ). , .4.12 (), 900oC, - , 糺 Ga . , ² (.4.12, ), 1000oC, GaAs. 糺 Ta Si , 糺 Ga As Ta34Si25N41, .

, Ta67Si33 Ta34Si25N41, 600oC 900oC, , . 㳿 , , . , 糿, ² : 1) Ta Si , Ga As , 600oC;




140 .


Ta67Si33/GaAs, 2) Ta34Si25N41/GaAs, 900oC.

Ta67Si33 Ta34Si25N41, . .4.2, , : 1) ~ 300 ~ 170 Ta67Si33, 800oC; 2) ~ 750 ~ 650 Ta34Si25N41, 1000oC. 750 685 , Ta34Si25N41 900oC, () .

.4.12 ² Ta34Si25N41/GaAs:

a) 800C 5 . (Ar); ) 900 1000C 5 . (Ar).

   

Ta-Si-N GaAs, , 40 .%, - Ta-Si. , GaAs, , .

, / Ta-Si-N, , .

4.3. Ta-Si-N GaAs

Ta-Si-N, Au-, Ag//GaAs, 800 , (Rs), . Rs, , (. 2, 3).

4.3.1. Au//GaAs.

Au/Ta-Si-N/GaAs, (400 800, Ar, 5 .), .4.13.

(11 2), Au//GaAs Ta-Si-N ( 1000 ), Au (~ 90 ), GaAs.

, Au ( GaAs, Ta-Si-N, Au). ( 3.2), ~ 4 Au (90 ), ᒺ Au ~ 2.3 [77]. , , .4.13, Au/GaAs, . Au-GaAs (340 [27]), 䳿 Au-GaAs, Au/GaAs, 400.

.4.13 Au/Ta-Si-N/GaAs, , ( 400 800, 5 . Ar).

Ta-Si-N, 400 500oC, , Rs 30%, Au/Ta67Si33/GaAs Au/Ta-Si-N/GaAs . , .

Au/Ta67Si33/GaAs, Rs 500oC. 600oC, - Ta-Si. , Ta67Si33, 700oC.

.4.13, Au/Ta-Si-N/GaAs, , 700oC. , Ta-Si-N, 27 36 .%, 䳿 Au GaAs, 700oC, . ³ 800oC, Ta-Si-N (N: 27 36 .%), Rs .

, 800oC Au/Ta53Si20N27/GaAs Au/Ta34Si25N41/GaAs, .4.14. .4.14 (), 800oC Au/Ta53Si20N27 Ta53Si20N27/GaAs, Ta53Si20N27, (.4.13).

(.4.13), , , 800 Au/Ta34Si25N41/GaAs (.4.14, ), : Ta34Si25N41 ( ~ 100 ), Au GaAs, 800.

.4.14 2 + , 800 (Ar, 5 .) : ) Au/Ta53Si20N27/GaAs; ) Au/Ta34Si25N41/GaAs.

㳿 , Au/Ta34Si25N41/GaAs, 800, .4.15, . - , , ~ 40 (.4.15, ). ³ 800, ~ 16050 (.4.15, ).

, Rs Au//GaAs, 400-500, Au.



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