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: 539.213; 539.23+621.793.79; 539.26 ԲͲ Ҳ ˲ Dz Вв W-Ti-N Ta-Si-N ...

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ᒺ W-Ti-N Ta-Si-N , , : W-TiN(Ta-Si-N)/GaAs, Au/W-Ti-N(Ta-Si-N)/GaAs, Ag/Ta-Si-N/GaAs, Au/Ta-Si- N/GaN.

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, , : IX ̳ Գ - -IX (, , 19 - 24.05.2003); 2nd Annual Conference of the German Vacuum Society and 8th European Vacuum Congress - EVC-8 (Berlin, Germany, 23 - 26.06.2003); European Congress and Exhibition on Advanced Materials and Processes - EUROMAT 2003 (Lausanne, Switzerland, 1 - 5.09.2003);

International Workshop on Surface Physics 2003: Metals on Surfaces IWSPPolanica Zdroj, Poland, 13 - 15.09.2003); 16th International Vacuum Congress, 12th International Conference on Solid Surface, 8th International Conference on Nanometer-Scale Science and Technology, 17th Vacuum National Symposium - IVC-16/ICSS-12/NANO-8/AIV-17 (Venice, Italy, 28.06. 2.07.2004); European Materials Conference - E-MRS 2004 Fall Meeting (Warsaw, Poland, 6 - 10.09.2004); II - -II ( - , , 20 - 24.09.2004);

X International Conference on Physics and Technology of Thin Films - ICPTTF-X (Ivano-Frankivsk, Ukraine, 16 - 21.05.2005); European Materials Conference - EMRS 2005 Fall Meeting (Warsaw, Poland, 5 - 9.09.2005); International Workshop on Surface Physics 2005: Advanced and Bio-Materials IWSP-2005 (Polanica Zdrj, Poland, 10 - 13.09.2005); International Conference Modern Materials Science: Achievements and Problems - MMS-2005 (Kiev, Ukraine, 26 .

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